Design of new lithographic systems using starting configurations based on A.I. (artificial intelligence) feature of Synopsys software. Overview of Projection lithography development, the challenges and limits of present technology. By using the DSearch macro in Synopsys software was conducted research and method proposed in design of novel UV lithographic objectives which should simplify the work of optical designer in early stage of design.
Последние новости
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Butterfly Effect: ITMO Researchers Create Colorful Perovskite Films for Optoelectronics
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Scientific Show, Lectures, and Lab Tours: Recap of Physics Day 2025 at ITMO
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ITMO-Developed Metasurface Makes Optical Chips 2x More Efficient
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“Combing” Light: ITMO Researchers Find Reliable and Fast Way to Transmit Data in Space