Journal: JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS

Short name
J Micro Nanolithogr MEMS
IF
1.22
SJR
0.39

Papers

Impact Factor

Scientific Journal Ranking

2016

1.
A.O. Golubok
N.V. Nikonorov
M.A. Prosnikov
A.I. Sidorov
, vol.
15
, pp.
013502-01350
, 2016
[DOI:
10.1117/1.JMM.15.1.013502
] [ IF:
1.335
, SJR:
0.426
]