Microwave seminar | 13 March 2025

 
Dr. Lev Logunov
ITMO Univeristy
Direct laser metallization as a new method for manufacturing microelectronic devices
Abstract

Direct laser metallization allows to obtain locally metallic and/or oxide structures on almost any surface. I will tell about the maximum resolution, materials from which it is possible to obtain and on which it is possible to obtain structures. The main limitations of the method and where we are striving in the future.

https://pubs.acs.org/doi/abs/10.1021/acsaelm.4c00337
https://www.sciencedirect.com/science/article/abs/pii/S0030399223006709