This course provides a systematic introduction to the scientific principles and technological aspects of using laser radiation to create micro- and nanoscale structures. It covers the fundamental interactions between laser radiation and materials, the design and characteristics of modern laser systems, and key laser fabrication techniques. Special emphasis is placed on hands-on learning through laboratory sessions.
Fundamentals of laser micro- and nanofabrication
Part 1. Fundamentals of interaction of laser radiation with matter
1. History of laser technologies. Operating principle, laser properties and areas of application
2. Interaction of laser radiation with matter. Thermal and non-thermal processes. Heat conduction equation
3. Effective operating parameters of a lasers
Part 2. Equipment for laser micro- and nanofabrication
5. Classification of lasers, their features and areas of application
6. Optical schemes for laser fabrication. Basic elements. Features of focusing optics. Scanning systems
7. Laser pulse control
Part 3. Methods of creating micro- and nanostructures
8. Laser annealing and dewetting
9. Laser ablation
10. Thermochemistry
Lab practices
Lab1. Laser ablation in liquids
Lab 2. Laser direct transfer
Lab 3. Material phase changing
Lab 4. Optical thermal chemistry