Pavel Alekseevskiy, Maria Timofeeva, Semyon Bachinin, Regis Peignier, Cedric Noel, Pascal Boulet, Thierry Belmonte, "Non-thermal plasma etching of MOF thin films in high optical quality for interference sensing", Optical Materials, vol. 154, pp. 115666, 2024, [DOI: 10.1016/j.optmat.2024.115666] [IF: 3.08, SJR: 0.60]